Title of cluster (medium version) Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Key-title: Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Key-title: Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena :
Title proper: Journal of vacuum science & technology. Microelectronics processing and phenomena.
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics processing and phenomena
Other variant title: Journal of vacuum science and technology.
Other variant title: Microelectronics processing and phenomena
Country: United States
Country: United States
Record information
Last modification date: 03/05/2023
Type of record: Confirmed
Last modification date: 06/02/2021
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
ISSN Center responsible of the record: ISSN National Centre for the USA