Title of cluster (medium version) Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Key-title: Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online)
Key-title: Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)
Title proper: Journal of vacuum science and technology. Nanotechnology & microelectronics :
Title proper: Journal of vacuum science and technology. Nanotechnology & microelectronics :
Other variant title: Nanotechnology & microelectronics
Other variant title: Nanotechnology and microelectronics
Other variant title: Journal of vacuum science and technology.
Other variant title: JVST B
Other variant title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Other variant title: Nanotechnology & microelectronics
Other variant title: JVST B, Nanotechnology & microelectronics
Other variant title: Nanotechnology and microelectronics
Other variant title: Journal of vacuum science and technology.
Other variant title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Country: United States
Country: United States
Record information
Last modification date: 06/02/2021
Type of record: Confirmed
Last modification date: 09/08/2023
Type of record: Confirmed
ISSN Center responsible of the record: ISSN National Centre for the USA
ISSN Center responsible of the record: ISSN National Centre for the USA